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Relation between microstructure induced by oxidation and room-temperature mechanical properties of the thermally grown oxide sca
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![SOLVED: (e) The silicon oxide thickness tox growth-rate for thermal oxidation of silicon is given by the following equation: t3x+Atox=B(t+t) x?+Axi 1 B where x; is the initial oxide thickness A and SOLVED: (e) The silicon oxide thickness tox growth-rate for thermal oxidation of silicon is given by the following equation: t3x+Atox=B(t+t) x?+Axi 1 B where x; is the initial oxide thickness A and](https://cdn.numerade.com/ask_images/51a28c2945d043aebdf8a4802e25ff10.jpg)
SOLVED: (e) The silicon oxide thickness tox growth-rate for thermal oxidation of silicon is given by the following equation: t3x+Atox=B(t+t) x?+Axi 1 B where x; is the initial oxide thickness A and
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