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Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers - ScienceDirect
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Electron Beam Lithography Systems | Nanofabrication of Quantum Devices
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Electron Beam Lithography Systems | Nanofabrication of Quantum Devices
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Electron Beam (E-Beam) Evaporation Systems
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Lesker PVD 75 Electron Beam Evaporation Tool
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